Akademik Veri Yönetim Sistemi
Journal of Materials Science: Materials in Electronics, cilt.36, sa.30, 2025 (SCI-Expanded, Scopus)
In this study, we report the fabrication of MoS2 microbox thin film structures obtained through a relatively simple and rapid two-stage sulfurization process and the testing of their sensor properties using ethanol and moisture as analyte gases. Molybdenum thin films, grown on Si substrates using DC magnetron sputtering, were obtained by chemical vapor deposition at 900 °C for 5 minutes at a time. In the first stage of the sulfurization process, the temperature was increased from room temperature to the specified temperature and then allowed to cool to room temperature spontaneously. The second stage of the sulfurization process was also performed at 900 °C using rapid thermal annealing (RTA). X-ray diffraction (XRD) analysis of the resulting MoS2 films revealed that the structure consisted of a semiconducting 2H–MoS2 phase, and a characteristic (002) plane peak of this phase was located at 2θ = 14.8°. The surface morphology and homogeneity of the films were then examined using scanning electron microscopy (SEM) and atomic force microscopy (AFM), and the structure was observed to be microbox-shaped. The elemental ratios of the microbox structures observed with SEM and the underlying structures were examined using energy-dispersive X-ray (EDX) analysis. Cross-section SEM and EDX images of the device, which was converted into a sensor by inserting a silver contact, were also examined. It was also determined that approximately 10% of the structure contained MoO2, which positively affects the sensor’s operating parameters. The sensor’s ultra-fast response and recovery times were 0.13 and 0.12 s for ethanol, respectively, and 0.7 and 0.2 s for humidity, respectively.